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Mechanical Study of High Resistance Silicon Carbide Based Multi-Nano-Layers Grown by Multifrequency PACVD

Farida Rebib, Thomas Gaudy, Audrey Soum-Glaude, et al.
Plasma Processes and Polymers 6 (S1) S917 (2009)
DOI: 10.1002/ppap.200932305
See this article