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Cited article:

Mechanical Study of High Resistance Silicon Carbide Based Multi‐Nano‐Layers Grown by Multifrequency PACVD

Farida Rebib, Thomas Gaudy, Audrey Soum‐Glaude, Isabelle Caron, Tony Da Silva, Christine Picard, Fabienne Cournut and Laurent Thomas
Plasma Processes and Polymers 6 (S1) (2009)
https://doi.org/10.1002/ppap.200932305