Hypothetic impact of chemical bonding on the moisture resistance of amorphous SixNyHz by plasma-enhanced chemical vapor depositionCatheline Cazako, Karim Inal, Alain Burr, Frederic Georgi and Rodolphe CauroMetall. Res. Technol., 115 4 (2018) 406DOI: https://doi.org/10.1051/metal/2018072
