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Micro-electronic devices analysis by high resolution transmission electron microscopy

E. Gautier, V. Dashtizadeh, T. Épicier, C. Esnouf, G. Brémond and C. Plossu

Rev. Met. Paris, 100 5 (2003) 477-494

DOI: https://doi.org/10.1051/metal:2003218

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