Rev. Met. Paris
Volume 100, Number 5, May 2003Science et Génie des Matériaux
Matériaux et microscopies
|Page(s)||495 - 506|
|Published online||17 November 2003|
Chemical analysis using X-ray and electron spectroscopies
This paper is mainly devoted to the presentation and the illustration of chemical microananalysis methods. Four basic techniques will be successively presented: the energy dispersive X-rays spectroscopy (EDS), the wave dispersive spectroscopy of X-rays (WDS), the electron energy loss spectroscopy (EELS) and the Auger spectroscopy (AES). For each of them, the limitations and advantages will be presented.
© La Revue de Métallurgie, 2003
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