| Issue |
Metall. Res. Technol.
Volume 121, Number 3, 2024
|
|
|---|---|---|
| Article Number | 311 | |
| Number of page(s) | 7 | |
| DOI | https://doi.org/10.1051/metal/2024030 | |
| Published online | 22 May 2024 | |
Short Communication
Cracks at shallow nanoindentation depths in titanium diboride hard thin coatings used in AFM nanoindentation☆
1
Department of Metallurgical and Materials Engineering, Central University of Jharkhand, Ranchi 835205, India
2
Centre of Excellence in Green and Efficient Energy Technology (CoE GEET), Central University of Jharkhand, Ranchi 835205, India
* e-mail: arnab.bhattacharya@cuj.ac.in
Received:
24
December
2023
Accepted:
15
April
2024
Hard coatings like Titanium diboride (TiB2) on silicon substrates which are used for interconnects. micro-electro-mechanical devices and metallurgical protective coatings were analyzed based on shallow depths of nanoindentation penetration. The change in the nature of the contact from Hertzian to Pyramidal both in loading as well as unloading modes were examined. Features like ductile fracture, linear unloading, and the creation of electrical conduction paths were analyzed. These high-precision features are influenced by the thickness and crystalline nature of the films and are significant for device fabrication.
Key words: Titanium diboride (TiB2) / thin films / nanoindentation / fracture / conduction
An unreviewed version of the article has been posted as a pre-print; https://doi.org/10.20944/preprints202311.1625.v1
© EDP Sciences, 2024
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