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Cited article:

Mesure de la conductivité thermique des couches minces d’oxyde

S. Orain, Y. Scudeller, T. Brousse

Rev. Met. Paris, 96 5 (1999) 667-676

Published online: 2017-01-16

DOI: https://doi.org/10.1051/metal/199996050667

PDF (43.8 MB)

This article has been cited by the following article(s):

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Plasma Processes and Polymers 4 (S1) S1 (2007)
https://doi.org/10.1002/ppap.200730101

Thermal parameters identification of micrometric layers of microelectronic devices by thermoreflectance microscopy

Stefan Dilhaire, Stéphane Grauby, Wilfrid Claeys and Jean-Christophe Batsale
Microelectronics Journal 35 (10) 811 (2004)
https://doi.org/10.1016/j.mejo.2004.06.012