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Thermal parameters identification of micrometric layers of microelectronic devices by thermoreflectance microscopy

Stefan Dilhaire, Stéphane Grauby, Wilfrid Claeys and Jean-Christophe Batsale
Microelectronics Journal 35 (10) 811 (2004)
DOI: 10.1016/j.mejo.2004.06.012
See this article