Metallurgical Research & Technology

Hypothetic impact of chemical bonding on the moisture resistance of amorphous Si_xN_yH_z by plasma-enhanced chemical vapor deposition

Catheline Cazako, Karim Inal, Alain Burr, Frederic Georgi and Rodolphe Cauro

Metall. Res. Technol., 115 4 (2018) 406

Published online: 24 August 2018

DOI: 10.1051/metal/2018072

Catheline Cazako

Karim Inal

Alain Burr

Frederic Georgi

Rodolphe Cauro

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