Rev. Met. Paris
Volume 101, Number 2, February 2004Science et Génie des Matériaux
Contraintes résiduelles (suite)
|Page(s)||97 - 102|
|Published online||24 March 2004|
X-ray diffraction study of thin film elasticity constants
We have developed an original method allowing to determine the elasticity constants of thin crystalline films deposited on substrates, which combines X-ray diffraction and in situ tensile testing. This technique has been successfully applied to measure the Poisson's ratio in tungsten thin films (150 nm) and molybdenum sublayers (8 nm) of a Mo/Ni multilayer. This paper gives the principles and experimental requirements for the Young's modulus determination.
© La Revue de Métallurgie, 2004
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